ECE 5700: Introduction to Microfabrication
Materials, wet chemical cleaning and etch, photolithography, metal deposition, doping, carrier density and conductivity, microfluids, micro-electronic-mechanical-systems.
Prerequisite/Restriction: PHYS 2210, PHYS 2215, PHYS 2220 and PHYS 2225 or instructor permission. Student must be in the Professional Engineering Program or have Graduate Standing. Cross-listed as: BENG 5700 and PHYS 5700.
Semester(s) Traditionally Offered: SPRING
Course Instructor: Bedri Cetiner